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Q  YieldE:Etch Time (mins)D:Mask DimensionC:Develop Time (seconds)B:Exposure Time (mins)A:Aperture Setting Block NumberCenter Points Run OrderStandard Order}F}F}F}F}F}tF} GF} F                ?&@??Small4@>@Small/@ @? @"@??Large4@>@Small-@"@@ @$@??SmallD@>@Small-@A@@ @@??LargeD@>@Small/@J@@ @@??Small4@F@Small-@0@@ @.@??Large4@F@Small/@6@@ @@??SmallD@F@Small/@F@@  @@??LargeD@F@Small-@N@ @ "@,@??Small4@>@Large-@@"@  $@??? Large 4@>@ Large /@$@$@  &@@?? Small D@>@ Large /@>@&@  (@(@?? Large D@>@ Large -@I@(@  *@ @?? Small 4@F@ Large /@.@*@  ,@@?? 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ANOVA Table""""""#Source of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model.@p@Pkwx@ A:Aperture Setting?~@~@ - -  B:Exposure Time?@@ - -  C:Develop Time?}@}@ - -  D:Mask Dimension?@@ - -   E:Etch Time ??? - -   AB ?g@g@ - -   AC ??? - -   AD ?@@@@ - -   AE ?@@@@ - -   BC??? - -   BD??? - -   BE??? - -   CD?@@ - -   CE??? - -   DE?@@@@ - - Residual~Total.@p@ ;2S = * R-sq = 100.0000% R-sq(adj) = 100.0000%0Regression Information1111112$%%%%%%& 'Term(Effect( Coefficient(Standard Error(Low CI(High CI(T Value)P Value$%%%%%%&* Intercept+~+P>@ +- +- +- +- ,-*A:Aperture Setting+@&@+@@ +- +- +- +- ,-*B:Exposure Time+@@+0@ +- +- +- +- ,- *C:Develop Time +%@+@ +- +- +- +- ,-!*D:Mask Dimension!++ܿ !+- !+- !+- !+- !,-"* E:Etch Time"+?+? "+- "+- "+- "+- ",- #*AB#+@+ @ #+- #+- #+- #+- #,- $*AC$+?+? $+- $+- $+- $+- $,- %*AD%+?+? %+- %+- %+- %+- %,- &*AE&+?+? &+- &+- &+- &+- &,- '*BC'+?+? 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Probabilityj &MDCR-T3;0;0; &MDCR-F &MDCR-S# &MDCR-T4;0;0; &MDCR-F\"Tahoma ~ww 0wf- !-40.000F# &MDCR-T5;0;0; &MDCR-F &MDCR-S# &MDCR-T4;0;0; &MDCR-F !40.000#  &MDCR-T5;0;0; &MDCR-F &MDCR-S-# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F#55 &MDCR-T4;0;0; &MDCR-F-#T T &MDCR-T4;0;0; &MDCR-F !-24.000F# &MDCR-T5;0;0; &MDCR-F &MDCR-S-#s s &MDCR-T4;0;0; &MDCR-F#  &MDCR-T4;0;0; &MDCR-F#  &MDCR-T4;0;0; &MDCR-F#  &MDCR-T4;0;0; &MDCR-F-# &MDCR-T4;0;0; &MDCR-F !-8.000#B &MDCR-T5;0;0; &MDCR-F &MDCR-S-#   &MDCR-T4;0;0; &MDCR-F#,, &MDCR-T4;0;0; &MDCR-F#KK &MDCR-T4;0;0; &MDCR-F#jj &MDCR-T4;0;0; &MDCR-F-# &MDCR-T4;0;0; &MDCR-F !8.000R# &MDCR-T5;0;0; &MDCR-F &MDCR-S-# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F-### &MDCR-T4;0;0; &MDCR-F !24.000#o &MDCR-T5;0;0; &MDCR-F &MDCR-S-#AA &MDCR-T4;0;0; &MDCR-F#`` &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F !1.000RS#/ &MDCR-T5;0;0; &MDCR-F &MDCR-S-## &MDCR-T4;0;0; &MDCR-F-!! &MDCR-T4;0;0; &MDCR-F   &MDCR-T4;0;0; &MDCR-F &MDCR-T4;0;0; &MDCR-F !5.000Ry/ &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F?? &MDCR-T4;0;0; &MDCR-F &MDCR-T4;0;0; &MDCR-F.. &MDCR-T4;0;0; &MDCR-F &MDCR-T4;0;0; &MDCR-F !10.000 &MDCR-T5;0;0; &MDCR-F &MDCR-S-MM &MDCR-T4;0;0; &MDCR-F-++ &MDCR-T4;0;0; &MDCR-F &MDCR-T4;0;0; &MDCR-F &MDCR-T4;0;0; &MDCR-F !50.000 &MDCR-T5;0;0; &MDCR-F &MDCR-S-- &MDCR-T4;0;0; &MDCR-F__ &MDCR-T4;0;0; &MDCR-Fqq &MDCR-T4;0;0; &MDCR-F. .  &MDCR-T4;0;0; &MDCR-F   &MDCR-T4;0;0; &MDCR-F !99.0002 &MDCR-T5;0;0; &MDCR-F &MDCR-S- &MDCR-T4;0;0; &MDCR-F-m r $&=MDCR-T58;2;1;Yield(Effect Points) DE X = -1.375 Y = 3.333 &MDCR-F;+&LMDCR-TD8;2;2;Yield(Effect Points) D:Mask Dimension X = -0.875 Y = 10.000 &MDCR-FB~$&>MDCR-T68;2;3;Yield(Effect Points) BE X = -0.125 Y = 16.667 &MDCR-F)~$&>MDCR-T68;2;4;Yield(Effect Points) BD X = -0.125 Y = 23.333 &MDCR-F$&=MDCR-T58;2;5;Yield(Effect Points) AC X = 0.375 Y = 30.0003 &MDCR-Fh$&=MDCR-T58;2;6;Yield(Effect Points) CE X = 0.375 Y = 36.6673 &MDCR-F%-(&FMDCR-T>8;2;7;Yield(Effect Points) E:Etch Time X = 0.625 Y = 43.333 &MDCR-F_%$&=MDCR-T58;2;8;Yield(Effect Points) BC X = 0.625 Y = 50.0003 &MDCR-F-<$&=MDCR-T58;2;9;Yield(Effect Points) CD X = 0.875 Y = 56.6673 &MDCR-FR$&>MDCR-T68;2;10;Yield(Effect Points) AD X = 1.125 Y = 63.333 &MDCR-FR?$&>MDCR-T68;2;11;Yield(Effect Points) AE X = 1.125 Y = 70.000 &MDCR-F-0U $&=MDCR-T58;1;1;Yield(Effect Points) AB X = 6.875 Y = 76.6670 &MDCR-F!AB*  &MDCR-T9;1;1; &MDCR-F &MDCR-S{  X*&JMDCR-TB8;1;2;Yield(Effect Points) C:Develop Time X = 10.875 Y = 83.333 &MDCR-F !C:Develop Timeu  &MDCR-T9;1;2; &MDCR-F &MDCR-S>  n,&NMDCR-TF8;1;3;Yield(Effect Points) A:Aperture Setting X = 11.125 Y = 90.000 &MDCR-F!A:Aperture Setting8  &MDCR-T9;1;3; &MDCR-F &MDCR-SPf+&KMDCR-TC8;1;4;Yield(Effect Points) B:Exposure Time X = 33.875 Y = 96.6670 &MDCR-F!B:Exposure Time;\ &MDCR-T9;1;4; &MDCR-F &MDCR-S-%#+S,J~&&MDCR-T8;3;0;Yield(Distribution Line) &MDCR-F!Effect Probability &MDCR-T6;0;0; &MDCR-F &MDCR-S- & &MDCR-T6;0;0; &MDCR-F( (& &MDCR-T6;0;0; &MDCR-F  !YieldRF &MDCR-T7;2;0; &MDCR-F &MDCR-S !Y' = Y &MDCR-T7;2;0; &MDCR-F &MDCR-S -E! &MDCR-T7;2;0; &MDCR-F!Non-Significant Effects! &MDCR-T7;2;0; &MDCR-F &MDCR-S-! &MDCR-T7;1;0; &MDCR-F!Significant Effectse[! &MDCR-T7;1;0; &MDCR-F &MDCR-S-v vM! &MDCR-T7;3;0; &MDCR-F!Distribution Line ! &MDCR-T7;3;0; &MDCR-F &MDCR-S ! 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O@   ư>?      @@@@v@v@TahomaDBTahomaDB ????{Gz?{Gz?{Gz??333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z   CB ???d Upper Legend Lower LegendCurrent Upper TitleCurrent Lower TitleCurrent Main TitleCurrent X-Axis TitleCurrent Y-Axis TitleColorColor = Size = X = Y =  Starts at:  Ends at:  Duration: ???*****Z       ? ? ? ?   SmallLarge 4@D@ >@F@ SmallLarge -@/@    ????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????  Aperture Setting  Exposure Timemins  Develop Timeseconds Mask Dimension  Etch Timemins  Yield   I  IABCDE ?     A  ABCDE ?     B  BACDE ?     C  CABDE ?     D  DABCE ?     E  ABCDABCD ?     AB  ABCDE ?     AC  ACBDE ?     AD  ADBCE ?     AE  BCDBCD ?     BC  BCADE ?     BD  BDACE ?     BE  ACDACD ?     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Probabilityj &MDCR-T3;0;0; &MDCR-F &MDCR-S# &MDCR-T4;0;0; &MDCR-F\"TahomaK ww 0w fp- !-50.000F# &MDCR-T5;0;0; &MDCR-F &MDCR-S#  &MDCR-T4;0;0; &MDCR-F !50.000# &MDCR-T5;0;0; &MDCR-F &MDCR-S-# &MDCR-T4;0;0; &MDCR-F#   &MDCR-T4;0;0; &MDCR-F#77 &MDCR-T4;0;0; &MDCR-F#`` &MDCR-T4;0;0; &MDCR-F-#  &MDCR-T4;0;0; &MDCR-F !-30.000F# &MDCR-T5;0;0; &MDCR-F &MDCR-S-#  &MDCR-T4;0;0; &MDCR-F#  &MDCR-T4;0;0; &MDCR-F#  &MDCR-T4;0;0; &MDCR-F#00 &MDCR-T4;0;0; &MDCR-F-#ZZ &MDCR-T4;0;0; &MDCR-F !-10.000F# &MDCR-T5;0;0; &MDCR-F &MDCR-S-# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F-#** &MDCR-T4;0;0; &MDCR-F !10.000#v &MDCR-T5;0;0; &MDCR-F &MDCR-S-#SS &MDCR-T4;0;0; &MDCR-F#}} &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F-# &MDCR-T4;0;0; &MDCR-F !30.000#F &MDCR-T5;0;0; &MDCR-F &MDCR-S-### &MDCR-T4;0;0; &MDCR-F#MM &MDCR-T4;0;0; &MDCR-F#ww &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F !10.000S# &MDCR-T5;0;0; &MDCR-F &MDCR-S-## &MDCR-T4;0;0; &MDCR-F- &MDCR-T4;0;0; &MDCR-F &MDCR-T4;0;0; &MDCR-FLL &MDCR-T4;0;0; &MDCR-F !50.000 &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F &MDCR-T4;0;0; &MDCR-F(( &MDCR-T4;0;0; &MDCR-F>> &MDCR-T4;0;0; &MDCR-F4 4 &MDCR-T4;0;0; &MDCR-F !99.0002 &MDCR-T5;0;0; &MDCR-F &MDCR-S- &MDCR-T4;0;0; &MDCR-F-"W"$&=MDCR-T58;1;1;Yield(Effect Points) AB X = 8.590 Y = 12.500 &MDCR-F!AB!% &MDCR-T9;1;1; &MDCR-F &MDCR-Sg*&JMDCR-TB8;1;2;Yield(Effect Points) C:Develop Time X = 13.587 Y = 37.500 &MDCR-F !C:Develop Time &MDCR-T9;1;2; &MDCR-F &MDCR-S>~,&NMDCR-TF8;1;3;Yield(Effect Points) A:Aperture Setting X = 13.899 Y = 62.500 &MDCR-F!A:Aperture Setting8 &MDCR-T9;1;3; &MDCR-F &MDCR-S 6 ]+&KMDCR-TC8;1;4;Yield(Effect Points) B:Exposure Time X = 42.323 Y = 87.500 &MDCR-F!B:Exposure Time;h S &MDCR-T9;1;4; &MDCR-F &MDCR-S- %#A&&MDCR-T8;3;0;Yield(Distribution Line) &MDCR-F!Effect Probability! &MDCR-T6;0;0; &MDCR-F &MDCR-S-!& &MDCR-T6;0;0; &MDCR-Fv!v& &MDCR-T6;0;0; &MDCR-F  !YieldRF! &MDCR-T7;1;0; &MDCR-F &MDCR-S !Y' = Y! &MDCR-T7;1;0; &MDCR-F &MDCR-S E("! &MDCR-T7;1;0; &MDCR-F!Significant Effects2" &MDCR-T7;1;0; &MDCR-F &MDCR-S-!Z" &MDCR-T7;3;0; &MDCR-F!Distribution Line[" &MDCR-T7;3;0; &MDCR-F &MDCR-S ! User's Name; ! &MDCR-T6;0;0; &MDCR-F &MDCR-S !CompanyS!! &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 2/23/2008Z"! &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 12:29:46 PM; #! &MDCR-T6;0;0; &MDCR-F &MDCR-S-#!#& &MDCR-T6;0;0; &MDCR-F &MDCR-}L--"Systemp fp !-YieldDExperimentResponse`P  .Yield  @"@A@J@0@6@F@N@@$@>@I@.@5@F@O@ ???????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????? ????????????????  @"@A@J@0@6@F@N@@$@>@I@.@5@F@O@ ????????????????P>@ ?    I  IABCDE ?     A  ABCDE ?     B  BACDE ?     C  CABDE ?     D  DABCE ?     E  ABCDABCD ?     AB  ABCDE ?     AC  ACBDE ?     AD  ADBCE ?     AE  BCDBCD ?     BC  BCADE ?     BD  BDACE ?     BE  ACDACD ?     CD  CDABE ?     CE  ABDABD ?     DE  ABCABC ?     ABC  ABCDE ?     ABD  ABDCE ?     ABE  ABECD ?     ACD  ACDBE ?     ACE  ACEBD ?     ADE  ADEBC ?     BCD  BCDAE ?     BCE  BCEAD ?     BDE  BDEAC ?     CDE  CDEAB ?     ABCD  ABCDE ?     ABCE  ABCED ?     ABDE  ABDEC ?     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