DOE++ Example Illustration

Factor A: Susceptor-Rotation Method	Factor B: Nozzle Position	Factor C: Depostion Temperature	Factor D: Deposition Time	Response: Thickness
Continuous	2	1210	Low	12.886
Oscillating	2	1210	Low	14.249
Continuous	6	1210	Low	14.059
Oscillating	6	1210	Low	13.775
Continuous	2	1220	Low	13.758
Oscillating	2	1220	Low	13.605
Continuous	6	1220	Low	13.707
Oscillating	6	1220	Low	14.031
Continuous	2	1210	High	14.506
Oscillating	2	1210	High	15.05
Continuous	6	1210	High	14.629
Oscillating	6	1210	High	14.274
Continuous	2	1220	High	13.926
Oscillating	2	1220	High	13.327
Continuous	6	1220	High	13.8
Oscillating	6	1220	High	13.723
Continuous	2	1210	Low	12.963
Oscillating	2	1210	Low	13.9
Continuous	6	1210	Low	13.989
Oscillating	6	1210	Low	14.586
Continuous	2	1220	Low	13.992
Oscillating	2	1220	Low	13.19
Continuous	6	1220	Low	13.623
Oscillating	6	1220	Low	14.467
Continuous	2	1210	High	14.153
Oscillating	2	1210	High	14.361
Continuous	6	1210	High	13.94
Oscillating	6	1210	High	13.904
Continuous	2	1220	High	14.052
Oscillating	2	1220	High	13.457
Continuous	6	1220	High	13.896
Oscillating	6	1220	High	13.914
Continuous	2	1210	Low	13.669
Oscillating	2	1210	Low	13.065
Continuous	6	1210	Low	13.666
Oscillating	6	1210	Low	14.379
Continuous	2	1220	Low	14.808
Oscillating	2	1220	Low	13.695
Continuous	6	1220	Low	14.21
Oscillating	6	1220	Low	14.675
Continuous	2	1210	High	14.134
Oscillating	2	1210	High	13.916
Continuous	6	1210	High	14.466
Oscillating	6	1210	High	14.317
Continuous	2	1220	High	14.392
Oscillating	2	1220	High	14.368
Continuous	6	1220	High	14.887
Oscillating	6	1220	High	14.913
Continuous	2	1210	Low	13.869
Oscillating	2	1210	Low	13.143
Continuous	6	1210	Low	14.706
Oscillating	6	1210	Low	13.775
Continuous	2	1220	Low	13.554
Oscillating	2	1220	Low	14.259
Continuous	6	1220	Low	14.042
Oscillating	6	1220	Low	14.252
Continuous	2	1210	High	14.339
Oscillating	2	1210	High	14.431
Continuous	6	1210	High	14.538
Oscillating	6	1210	High	14.754
Continuous	2	1220	High	14.428
Oscillating	2	1220	High	14.405
Continuous	6	1220	High	14.902
Oscillating	6	1220	High	14.808
Continuous	2	1210	Low	14.145
Oscillating	2	1210	Low	13.708
Continuous	6	1210	Low	13.863
Oscillating	6	1210	Low	13.382
Continuous	2	1220	Low	14.283
Oscillating	2	1220	Low	14.428
Continuous	6	1220	Low	14.881
Oscillating	6	1220	Low	13.658
Continuous	2	1210	High	14.953
Oscillating	2	1210	High	14.968
Continuous	6	1210	High	15.281
Oscillating	6	1210	High	15.188
Continuous	2	1220	High	13.568
Oscillating	2	1220	High	13.932
Continuous	6	1220	High	14.461
Oscillating	6	1220	High	14.469
Continuous	2	1210	Low	14.007
Oscillating	2	1210	Low	14.255
Continuous	6	1210	Low	13.357
Oscillating	6	1210	Low	13.382
Continuous	2	1220	Low	13.904
Oscillating	2	1220	Low	14.223
Continuous	6	1220	Low	14.378
Oscillating	6	1220	Low	13.578
Continuous	2	1210	High	15.455
Oscillating	2	1210	High	15.294
Continuous	6	1210	High	15.046
Oscillating	6	1210	High	14.923
Continuous	2	1220	High	15.074
Oscillating	2	1220	High	13.552
Continuous	6	1220	High	14.454
Oscillating	6	1220	High	13.973