DSdsV2_2 Weibull_7 J^BNntN;|!2 Level Full Factorial DesignDFoliop8  1234567 K `       `    Continuous21210Low  ? ʡ)@     Oscillating21210Low ? ?7 sh|,@     Continuous61210Low ? ?_ |?5,@     Oscillating61210Low ?? ?9 ̌+@     Continuous21220Low ? ? jt+@     Oscillating21220Low ?? ?# (\5+@     Continuous61220Low ?? ?W Dli+@     Oscillating61220Low ??? ? Zd;,@     Continuous21210High ? ? Pn-@      Oscillating21210High ?? ?V .@      Continuous61210High ?? ?+ 5^I B-@      Oscillating61210High ??? ?Y ?5^I,@      Continuous21220High ?? ?< '1+@      Oscillating21220High ??? ?  Cl*@     Continuous61220High ??? ?G +@     Oscillating61220High ???? ? V-r+@     Continuous21210Low  ?T V)@     Oscillating21210Low ? ?C +@     Continuous61210Low ? ? |?5^+@     Oscillating61210Low ?? ?A y&1,-@     Continuous21220Low ? ?8 Cl+@     Oscillating21220Low ?? ?5 zGa*@     Continuous61220Low ?? ? ">+@     Oscillating61220Low ??? ?! v,@     Continuous21210High ? ?] uVN,@     Oscillating21210High ?? ? FԸ,@     Continuous61210High ?? ?  zG+@     Oscillating61210High ??? ?- ++@     Continuous21220High ?? ?" v,@     Oscillating21220High ??? ?' Dl*@     Continuous61220High ??? ?` n+@     Oscillating61220High ???? ? +@      Continuous21210Low  ? J +V+@! !    Oscillating21210Low ? ?^ zG!*@" "    Continuous61210Low ? ?F ET+@# #    Oscillating61210Low ?? ?  5^I ,@$ $    Continuous21220Low ? ?& V--@% %    Oscillating21220Low ?? ?$ p= c+@& &    Continuous61220Low ?? ?M Qk,@' '    Oscillating61220Low ??? ?. Y-@( (    Continuous21210High ? ?B S㥛D,@) )    Oscillating21210High ?? ? E+@* *    Continuous61210High ?? ? ;O,@+ +    Oscillating61210High ??? ?E M,@, ,    Continuous21220High ?? ?N bX9,@- -    Oscillating21220High ??? ?? #~j,@. .    Continuous61220High ??? ? /$-@/ /    Oscillating61220High ???? ?O ~jt-@0 0    Continuous21210Low  ? rh+@1 1    Oscillating21210Low ? ?  K7I*@2 2    Continuous61210Low ? ?J xi-@3 3    Oscillating61210Low ?? ?> ̌+@4 4    Continuous21220Low ? ?( S+@5 5    Oscillating21220Low ?? ?P S㥛,@6 6    Continuous61220Low ?? ? /$,@7 7    Oscillating61220Low ??? ? /$,@8 8    Continuous21210High ? ?S !rh,@9 9    Oscillating21210High ?? ?/ &1,@: :    Continuous61210High ?? ?, ~jt-@; ;    Oscillating61210High ??? ? 5^I -@< <    Continuous21220High ?? ?= B`",@= =    Oscillating21220High ??? ?I (\,@> >    Continuous61220High ??? ?@ -@? ?    Oscillating61220High ???? ?: V--@@ @    Continuous21210Low  ?\  ףp=J,@A A    Oscillating21210Low ? ?D "~j+@B B    Continuous61210Low ? ?X `"۹+@C C    Oscillating61210Low ?? ?H $*@D D    Continuous21220Low ? ?% 7A`,@E E    Oscillating21220Low ?? ?  B`",@F F    Continuous61220Low ?? ? Pn-@G G    Oscillating61220Low ??? ? 7A`P+@H H    Continuous21210High ? ?U --@I I    Oscillating21210High ?? ?[ V--@J J    Continuous61210High ?? ?L Zd;ߏ.@K K    Oscillating61210High ??? ?Z K7A`.@L L    Continuous21220High ?? ?* A`"+@M M    Oscillating21220High ??? ?3 w/+@N N    Continuous61220High ??? ?0 y&1,@O O    Oscillating61220High ???? ?Q 㥛 ,@P P    Continuous21210Low  ?; $,@Q Q    Oscillating21210Low ? ? (\,@R R    Continuous61210Low ? ? X9ȶ*@S S    Oscillating61210Low ?? ?  $*@T T    Continuous21220Low ? ?4 ++@U U    Oscillating21220Low ?? ?R V-r,@V V    Continuous61220Low ?? ? K7,@W W    Oscillating61220Low ??? ?2 -'+@X X    Continuous21210High ? ?6 )\.@Y Y    Oscillating21210High ?? ? J +.@Z Z    Continuous61210High ?? ? d;O.@[ [    Oscillating61210High ??? ? jt-@\ \    Continuous21220High ?? ?) S%.@] ]    Oscillating21220High ??? ?K v+@^ ^    Continuous61220High ??? ?  r,@_ _    Oscillating61220High ???? ?1 V-+@` `  ư>?      @@@@v@v@TahomaDBTahomaDB ????{Gz?{Gz?{Gz??333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z   CB ???d Upper Legend Lower LegendCurrent Upper TitleCurrent Lower TitleCurrent Main TitleCurrent X-Axis TitleCurrent Y-Axis TitleColorColor = Size = X = Y =  Starts at:  Ends at:  Duration: ???*****Z      ? ? ? ?    Continuous Oscillating 26 @@ LowHigh `????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????  Susceptor-Rotation Method Nozzle Position Deposition Temperature Deposition Time   Thickness   I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD                   Block 1    1    Continuous Oscillating 26 @@ LowHigh  Susceptor-Rotation Method Nozzle Position Deposition Temperature Deposition Time`   $9 =3%X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H p p   p@@ p@ p @  p8 @ p@ p p8 8 p@ p p   p8 8 Design   dMbP?_*+%&A Page &P&?'?(?)?"d??` Q_ ThicknessD:Deposition Time C:Deposition Temperature B:Nozzle Position "A:Susceptor-Rotation Method  Block NumberCenter Points Run OrderStandard Order}F}A F}F}B F}F}GF} F                                 ! " # $ % & ' ( ) * + , - . / 0 1 2 3 4 5 6 7 8 9 : ; < = > ? @ A B C D E F G H I J K L M N O P Q R S T U V W X Y Z [ \ ] ^ _ ?8@?? Continuous@@ Lowʡ)@~ ?@K@?? Oscillating@@ Lowsh|,@~ @@W@?? Continuous@@ Low|?5,@~ @@L@?? Oscillating@@ Low̌+@~ @@ @?? Continuous@@ Lowjt+@~ @@A@?? Oscillating@@ Low(\5+@~ @@U@?? Continuous@@ LowDli+@~ @ @9@?? Oscillating@@ LowZd;,@~  @"@=@?? Continuous@@ HighPn-@~ "@ $@U@??  Oscillating @@ High .@~ $@ &@E@??  Continuous @@ High 5^I B-@~ &@ (@@V@??  Oscillating @@ High ?5^I,@~ (@ *@N@??  Continuous @@ High '1+@~ *@ ,@*@??  Oscillating @@ High Cl*@~ ,@.@Q@?? Continuous@@ High+@~ .@0@@?? Oscillating@@ HighV-r+@~ 0@1@U@?? Continuous@@ LowV)@~ 1@2@P@?? Oscillating@@ Low+@~ 2@3@@?? Continuous@@ Low|?5^+@~ 3@4@@P@?? Oscillating@@ Lowy&1,-@~ 4@5@L@?? Continuous@@ LowCl+@~ 5@6@J@?? Oscillating@@ LowzGa*@~ 6@7@3@?? Continuous@@ Low">+@~ 7@8@@@?? Oscillating@@ Lowv,@~ 8@9@@W@?? Continuous@@ HighuVN,@~ 9@:@?@?? Oscillating@@ HighFԸ,@~ :@;@&@?? Continuous@@ HighzG+@~ ;@<@F@?? Oscillating@@ High++@~ <@=@A@?? Continuous@@ Highv,@~ =@>@C@?? Oscillating@@ HighDl*@~ >@?@X@?? Continuous@@ Highn+@~ ?@@@@?? Oscillating@@ High+@~ @@ @@.@??  Continuous @@ Low J +V+@~ @@!A@W@??! Oscillating!@@ !Low!zG!*@~! A@"A@Q@??" Continuous"@@ "Low"ET+@~" A@#B@$@??# Oscillating#@@ #Low#5^I ,@~# B@$B@C@??$ Continuous$@@ $Low$V--@~$ B@%C@B@??% Oscillating%@@ %Low%p= c+@~% C@&C@@S@??& Continuous&@@ &Low&Qk,@~& C@'D@G@??' Oscillating'@@ 'Low'Y-@~' D@(D@P@??( Continuous(@@ (High(S㥛D,@~( D@)E@,@??) Oscillating)@@ )High)E+@~) E@*E@@??* Continuous*@@ *High*;O,@~* E@+F@@Q@??+ Oscillating+@@ +High+M,@~+ F@,F@S@??, Continuous,@@ ,High,bX9,@~, F@-G@O@??- Oscillating-@@ -High-#~j,@~- G@.G@@??. Continuous.@@ .High./$-@~. G@/H@S@??/ Oscillating/@@ /High/~jt-@~/ H@0H@<@??0 Continuous0@@ 0Low0rh+@~0 H@1I@"@??1 Oscillating1@@ 1Low1K7I*@~1 I@2I@R@??2 Continuous2@@ 2Low2xi-@~2 I@3J@O@??3 Oscillating3@@ 3Low3̌+@~3 J@4J@D@??4 Continuous4@@ 4Low4S+@~4 J@5K@T@??5 Oscillating5@@ 5Low5S㥛,@~5 K@6K@4@??6 Continuous6@@ 6Low6/$,@~6 K@7L@2@??7 Oscillating7@@ 7Low7/$,@~7 L@8L@T@??8 Continuous8@@ 8High8!rh,@~8 L@9M@G@??9 Oscillating9@@ 9High9&1,@~9 M@:M@F@??: Continuous:@@ :High:~jt-@~: M@;N@???; Oscillating;@@ ;High;5^I -@~; N@<N@N@??< Continuous<@@ <High<B`",@~< N@=O@@R@??= Oscillating=@@ =High=(\,@~= O@>O@P@??> Continuous>@@ >High>-@~> O@?P@M@??? Oscillating?@@ ?High?V--@~? P@@@P@W@??@ Continuous@@@ @Low@ ףp=J,@~@ @P@AP@Q@??A OscillatingA@@ ALowA"~j+@~A P@BP@V@??B ContinuousB@@ BLowB`"۹+@~B P@CQ@R@??C OscillatingC@@ CLowC$*@~C Q@D@Q@B@??D ContinuousD@@ DLowD7A`,@~D @Q@EQ@@@??E OscillatingE@@ ELowEB`",@~E Q@FQ@>@??F ContinuousF@@ FLowFPn-@~F Q@GR@@??G OscillatingG@@ GLowG7A`P+@~G R@H@R@@U@??H ContinuousH@@ HHighH--@~H @R@IR@V@??I OscillatingI@@ IHighIV--@~I R@JR@S@??J ContinuousJ@@ JHighJZd;ߏ.@~J R@KS@V@??K OscillatingK@@ KHighKK7A`.@~K S@L@S@E@??L ContinuousL@@ LHighLA`"+@~L @S@MS@I@??M OscillatingM@@ MHighMw/+@~M S@NS@H@??N ContinuousN@@ NHighNy&1,@~N S@OT@@T@??O OscillatingO@@ OHighO㥛 ,@~O T@P@T@M@??P ContinuousP@@ PLowP$,@~P @T@QT@0@??Q OscillatingQ@@ QLowQ(\,@~Q T@RT@:@??R ContinuousR@@ RLowRX9ȶ*@~R T@SU@(@??S OscillatingS@@ SLowS$*@~S U@T@U@J@??T ContinuousT@@ TLowT++@~T @U@UU@T@??U OscillatingU@@ ULowUV-r,@~U U@VU@6@??V ContinuousV@@ VLowVK7,@~V U@WV@I@??W OscillatingW@@ WLowW-'+@~W V@X@V@K@??X ContinuousX@@ XHighX)\.@~X @V@YV@;@??Y OscillatingY@@ YHighYJ +.@~Y V@ZV@7@??Z ContinuousZ@@ ZHighZd;O.@~Z V@[W@1@??[ Oscillating[@@ [High[jt-@~[ W@\@W@D@??\ Continuous\@@ \High\S%.@~\ @W@]W@R@??] Oscillating]@@ ]High]v+@~] W@^W@5@??^ Continuous^@@ ^High^ r,@~^ W@_X@ H@ ? ?_! Oscillating_!@!@ _!High_"V-+@~_ X@>_dd n =3%X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma1 Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H   @   8@ 8 0 8  <   @ 0   x@@$x@$x  @$ @   8@ 8 8 0@ 0 8 0  < 0 @ 0 0 x@@$x@$x  @$ Sheet1   dMbP?_*+%&A Page &P&?'?(?)?"d??/I} F}F}F}F}F@@@@@@@@@ @ @ @ @ @@@@@@@@@@@@@@@@@ @!@"@#@$@%@&@'@(@)@*@+@,@-@.@# ANOVA Table$$$$$$%Source of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model~.@\(%@?ܵ?& A:Susceptor-Rotation Method~?;On?;On?ڊe?Mb?  B:Nozzle Position~?w/?w/?9EGr@-1? # C:Deposition Temperature~?+ h?+ h?K7A`?_L?  D:Deposition Time~?Ǻ @Ǻ @PnC8@j>   AB~ ? _LU? _LU? Ǻv? %u?   AC~ ? Nё\C? Nё\C? 3ı.n? n?   AD~ ? Q? Q?  0*? V/?   BC~ ? '1Z? '1Z?  rh? J4?   BD~ ? JY8? JY8? ڊe? {Pk?   CD~?6@6@lV}(@-C6J?  ABC~?Q|a2?Q|a2?Aǘ?Q?  ABD~??W[??W[?~:?a2U0*?  ACD~?_vO?_vO?48E?镲 q?  BCD~?(\?(\?+ݓ?q= ףp?  ABCD~?a2U0*?a2U0*?0*?!rh? Residual~T@k 3@ffffff? Pure Error~T@k 3@ffffff?Total~ W@ ;M =@ !">5S = 0.4874 R-sq = 35.7085% R-sq(adj) = 23.6538%4Regression Information5555556&''''''( )Term*Effect* Coefficient*Standard Error*Low CI*High CI*T Value+P Value&''''''(, Intercept--R,@-58EGr?-x&1(,@-rh|,@-q@~.$,A:Susceptor-Rotation Method-ףp= ׳-ܵ|У-58EGr?-v-ׁsF?-LJ/Mb? ,B:Nozzle Position -Gz? -? -58EGr? -y&1l? -u? ->W[? .-1?!!,C:Deposition Temperature!-ܵ|г!-ܵ|У!-58EGr?!-v!-ׁsF?!-鷯!/_L?",D:Deposition Time"-\(\?"-\(\?"-58EGr?"-47?"-B>٬?"-ݵ|г@"0j> #,AB#-_vO~?#-_vOn?#-58EGr?#-?#-/$?#-On?#/%u? $,AC$-Gz$-&†$-58EGr?$-Pn$-46W[?+-Kӿ+/镲 q? ,,BCD,- h"?,-)\(?,-58EGr?,-Pkw,-`TR'?,-B?,/q= ףp? -1ABCD-2{Gz?-2{Gz?-258EGr?-2&S-2?-2B?-3!rh?.>dd  =8X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H Sheet1   dMbP?_*+%&A Page &P&?'?(?)?"d??@}& F>dd&   $@F@.@ ??    GF@@?d Pareto Chart)User Name Company 2/27/2008 9:34:49 AM#ReliaSoft DOE++ - www.ReliaSoft.comAlpha = 0.1; Threshold = 1.6641 Pareto ChartStandardized Effect (T Value)TermColor T Value = X = Y =  Starts at:  Ends at:  Duration: ???*****#ReliaSoft DOE++ - www.ReliaSoft.comZ @@@@v@v@TahomaDBTahomaDB o_?+P?{Gz?c]Kȵ?gj+?ͪժ?y):?;S.?333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z  ThicknessNon-Significant EffectsThickness(Effect Points)Non-Significant EffectsThickness Y' = Yd? ThicknessSignificant EffectsThickness(Effect Points)Significant EffectsThickness Y' = Yd? 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User Name 6" &MDCR-T6;0;0; &MDCR-F &MDCR-S !CompanyS!6" &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 2/27/2008Z"6" &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 9:34:49 AM #6" &MDCR-T6;0;0; &MDCR-F &MDCR-S#6"#& &MDCR-T6;0;0; &MDCR-F &MDCR-}g--"System f !h-Optimal Solution DSpreadSheet =H?&8X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)"$"#,##0_);[Red]\("$"#,##0\) "$"#,##0.00_);\("$"#,##0.00\)%""$"#,##0.00_);[Red]\("$"#,##0.00\)3*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_)*)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_);,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)2+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H  @I@ 8 @I@ 0 @I@ "p AI@ "p AI@   x @x x Sheet1   dMbP?_*+%&APage &P&?'?(?)?"dXX???@}nF}& F} F}$F}mF}& F@   6.Optimal Solutions from the Model for Thickness)!Settings in terms of Actual Value B C DPredicted Thickness Position 6K@ High~-@ Position 2~j@ High~-@( Settings in terms of Coded Value B C D Predicted Thickness~ ? Ps ?-@~  48E뿽 ?-@7/Optimal Solution by Considering the VariabilityRegression Information   TermEffect Coefficient  InterceptQB:Nozzle PositionXX C:Deposition Temperaturey&1y&1( Settings in terms of Coded Value B C DPredicted ThicknessPredicted Thickness Std~?Ps?-@14?DDDDDA~48E뿽?-@1Q5b?DDDDDA>  dd& d OptimizationDFolio08  1234567 K `       `    Continuous21210Low  ? ʡ)@     Oscillating21210Low ? ?7 sh|,@     Continuous61210Low ? ?_ |?5,@     Oscillating61210Low ?? ?9 ̌+@     Continuous21220Low ? ? jt+@     Oscillating21220Low ?? ?# (\5+@     Continuous61220Low ?? ?W Dli+@     Oscillating61220Low ??? ? Zd;,@     Continuous21210High ? ? Pn-@      Oscillating21210High ?? ?V .@      Continuous61210High ?? ?+ 5^I B-@      Oscillating61210High ??? ?Y ?5^I,@      Continuous21220High ?? ?< '1+@      Oscillating21220High ??? ?  Cl*@     Continuous61220High ??? ?G +@     Oscillating61220High ???? ? 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E+@* *    Continuous61210High ?? ? ;O,@+ +    Oscillating61210High ??? ?E M,@, ,    Continuous21220High ?? ?N bX9,@- -    Oscillating21220High ??? ?? #~j,@. .    Continuous61220High ??? ? /$-@/ /    Oscillating61220High ???? ?O ~jt-@0 0    Continuous21210Low  ? rh+@1 1    Oscillating21210Low ? ?  K7I*@2 2    Continuous61210Low ? ?J xi-@3 3    Oscillating61210Low ?? ?> ̌+@4 4    Continuous21220Low ? ?( S+@5 5    Oscillating21220Low ?? ?P S㥛,@6 6    Continuous61220Low ?? ? /$,@7 7    Oscillating61220Low ??? ? /$,@8 8    Continuous21210High ? ?S !rh,@9 9    Oscillating21210High ?? ?/ &1,@: :    Continuous61210High ?? ?, ~jt-@; ;    Oscillating61210High ??? ? 5^I -@< <    Continuous21220High ?? ?= B`",@= =    Oscillating21220High ??? ?I (\,@> >    Continuous61220High ??? ?@ -@? ?    Oscillating61220High ???? ?: V--@@ @    Continuous21210Low  ?\  ףp=J,@A A    Oscillating21210Low ? ?D "~j+@B B    Continuous61210Low ? ?X `"۹+@C C    Oscillating61210Low ?? ?H $*@D D    Continuous21220Low ? ?% 7A`,@E E    Oscillating21220Low ?? ?  B`",@F F    Continuous61220Low ?? ? Pn-@G G    Oscillating61220Low ??? ? 7A`P+@H H    Continuous21210High ? ?U --@I I    Oscillating21210High ?? ?[ V--@J J    Continuous61210High ?? ?L Zd;ߏ.@K K    Oscillating61210High ??? ?Z K7A`.@L L    Continuous21220High ?? ?* A`"+@M M    Oscillating21220High ??? ?3 w/+@N N    Continuous61220High ??? ?0 y&1,@O O    Oscillating61220High ???? ?Q 㥛 ,@P P    Continuous21210Low  ?; $,@Q Q    Oscillating21210Low ? ? (\,@R R    Continuous61210Low ? ? X9ȶ*@S S    Oscillating61210Low ?? ?  $*@T T    Continuous21220Low ? ?4 ++@U U    Oscillating21220Low ?? ?R V-r,@V V    Continuous61220Low ?? ? K7,@W W    Oscillating61220Low ??? ?2 -'+@X X    Continuous21210High ? ?6 )\.@Y Y    Oscillating21210High ?? ? J +.@Z Z    Continuous61210High ?? ? d;O.@[ [    Oscillating61210High ??? ? jt-@\ \    Continuous21220High ?? ?) S%.@] ]    Oscillating21220High ??? ?K v+@^ ^    Continuous61220High ??? ?  r,@_ _    Oscillating61220High ???? ?1 V-+@` `    Thickness,@-@.@??  Susceptor-Rotation Method?@P.5  Nozzle Position?@P.5  Deposition Temperature?P.5  Deposition Time?@P.5   Optimal Solution 1 Jt8   -@ -@ Optimal Solution 2 D  -@ -@ ư>?   Optimal Solution 1 Jt8   -@ -@ @@@@v@v@TahomaDBTahomaDB o_?n/i?{Gz?iQ?gj+?ZӼ?,C6?Oz1?333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z ' Folio Data SetContinuous FunctionContinuous FunctionContinuous FunctionFactor vs Responsed?' Folio Data SetDiscrete FunctionDiscrete FunctionDiscrete FunctionFactor vs Responsed?' Folio Data SetNozzle Position vs ThicknessNozzle Position vs ThicknessDiscrete FunctionFactor vs Responsed?' Folio Data Set#Deposition Temperature vs Thickness#Deposition Temperature vs ThicknessContinuous FunctionFactor vs Responsed?' Folio Data SetDeposition Time vs ThicknessDeposition Time vs ThicknessDiscrete FunctionFactor vs Responsed?Folio Data Set Factor Value Factor Value Factor Valued ?Folio Data SetResponse ValueResponse ValueResponse Valued ?  cb ?>c+@O F%s-@?d Optimization*User Name Company 2/27/2008 11:11:52 AM#ReliaSoft DOE++ - www.ReliaSoft.comOptimal Solution 1ColorColor = Size = X = Y =  Starts at:  Ends at:  Duration: ???*****#ReliaSoft DOE++ - www.ReliaSoft.com?Nozzle Position X = 1.0000?#Deposition Temperature X = -0.0353?Deposition Time X = 1.0000>c+@O F%s-@Thickness (Target) Y = 14.5000Z1?21?2 *)' Folio Data SetContinuous FunctionContinuous FunctionContinuous FunctionFactor vs Responsed?' Folio Data SetDiscrete FunctionDiscrete FunctionDiscrete FunctionFactor vs Responsed?' Folio Data SetNozzle Position vs ThicknessNozzle Position vs ThicknessDiscrete FunctionFactor vs Responsed?L`,@?-@' Folio Data Set#Deposition Temperature vs Thickness#Deposition Temperature vs ThicknessContinuous FunctionFactor vs Responsed?O F%s-@8Th-@"]-@ gR-@ffffffi(G-@333333گ(=-@K7A2-@ٿp'-@233333ӿ-FJ-@ɿͪ-@qU -@<Zk.,@?Cc],@?.b,,@433333?r,@?D,@?봁N,@433333?% J,@gfffff?z,@?p,@?xؚ,@?|&1,@' Folio Data SetDeposition Time vs ThicknessDeposition Time vs ThicknessDiscrete FunctionFactor vs Responsed?>c+@?-@Folio Data Set Factor Value Factor Value Factor Valued ??Jt8 ?Folio Data SetResponse ValueResponse ValueResponse Valued ?-@     ? ? ? ?    Continuous Oscillating 26 @@ LowHigh `????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????,C:\DOCUME~1\ashiya\LOCALS~1\Temp\RSF21B7.tmp  Susceptor-Rotation Method Nozzle Position Deposition Temperature Deposition Time   Thickness@   I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD                   Block 1    1    Continuous Oscillating 26 @@ LowHigh  Susceptor-Rotation Method Nozzle Position Deposition Temperature Deposition Time`   $9 =3%X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)"